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光学材料的表征 英文【2025|PDF下载-Epub版本|mobi电子书|kindle百度云盘下载】

光学材料的表征 英文
  • (美)布伦德尔,(美)埃文斯,(美)伊莎霍斯主编 著
  • 出版社: 哈尔滨:哈尔滨工业大学出版社
  • ISBN:9787560342795
  • 出版时间:2014
  • 标注页数:211页
  • 文件大小:31MB
  • 文件页数:227页
  • 主题词:光学材料-研究-英文

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图书目录

INTRODUCTION1

PART Ⅰ:INFLUENCE OF SURFACE MORPHOLOGY AND MICROSTRUCTURE ON OPTICAL RESPONSE9

CHARACTERIZATION OF SURFACE ROUGHNESS9

1.1 Introduction9

1.2 What Surface Roughness Is10

1.3 How Surface Roughness Affects Optical Measurements14

1.4 How Surface Roughness and Scattering Are Measured14

1.5 Characterization of Selected Surfaces20

1.6 Future Directions23

CHARACTERIZATION OF THE NEAR-SURFACE REGION USING POLARIZATION-SENSITIVE OPTICAL TECHNIQUES27

2.1 Introduction27

2.2 Ellipsometry29

Experimental Implementations of Ellipsometry29

Analysis of Ellipsometry Data32

2.3 Microstructural Determinations from Ellipsometry Data34

Temperature Dependence of the Optical Properties of Silicon34

Determination of the Optical Functions of Glasses Using SE35

Spectroscopic Ellipsometry Studies of SiO2/Si37

Spectroscopic Ellipsometry for Complicated Film Structures38

Time-Resolved Ellipsometry40

Single-Wavelength Real-Time Monitoring of Film Growth41

Multiple-Wavelength Real-Time Monitoring of Film Growth42

Infrared Ellipsometry Studies of Film Growth44

THE COMPOSITION,STOICHIOMETRY,AND RELATED MICROSTRUCTURE OF OPTICAL MATERIALS49

3.1 Introduction49

3.2 Aspects of Raman Scattering50

3.3 Ⅲ-Ⅴ Semiconductor Systems51

3.4 Group Ⅳ Materials56

3.5 Amorphous and Microcrystalline Semiconductors59

Chalcogenide Glasses60

Group Ⅳ Microcrystalline Semiconductors63

3.6 Summary66

DIAMOND AS AN OPTICAL MATERIAL71

4.1 Introduction71

4.2 Deposition Methods72

4.3 Optical Properties of CVD Diamond74

4.4 Defects in CVD Diamond76

4.5 Polishing CVD Diamond79

4.6 X-ray Window80

4.7 Summary81

PART Ⅱ:STABILITY AND MODIFICATION OF FILM AND SURFACE OPTICAL PROPERTIES87

MULTILAYER OPTICAL COATINGS87

5.1 Introduction87

5.2 Single-Layer Optical Coatings89

Optical Constants90

Composition Measurement Techniques91

5.3 Multilayer Optical Coatings106

Compositional Analysis107

Surface Analytical Techniques108

Microstructural Analysis of Multilayer Optical Coatings109

5.4 Stability of Multilayer Optical Coatings111

5.5 Future Compositional and Microstructural Analytical Techniques113

CHARACTERIZATION AND CONTROL OF STRESS IN OPTICAL FILMS117

6.1 Introduction117

6.2 Origins of Stress119

6.3 Techniques for Modifying or Controlling Film Stress124

Effect of Deposition Parameters124

Effect of Ion-Assisted Deposition127

Effect of Impurities127

Effect of Post Deposition Annealing128

6.4 Stress Measurement Techniques130

Substrate Deformation130

X-Ray Diffraction(XRD)133

Raman Spectroscopy134

6.5 Future Directions136

SURFACE MODIFICATION OF OPTICAL MATERIALS141

7.1 Introduction141

7.2 Fundamental Processes142

Ion-Solid Interactions142

Defect Production,Rearrangement,and Retention143

7.3 Ion Implantation of Some Optical Materials145

Glasses and Amorphous Silica145

α-Quartz(SiO2)147

Halides148

Sapphire(α-Al2O3)149

LiNbO3152

Preparation of Optical Components by Ion Implantation153

LASER-INDUCED DAMAGE TO OPTICAL MATERIALS157

8.1 Introduction157

8.2 Laser Damage Definition and Statistics158

Defining Damage158

Collecting Damage Statistical Data159

Types of Damage Probability Distributions160

Identification of Pre-Damage Sites160

Changing the Damage Threshold161

8.3 In Situ Diagnostics165

Photothermal Techniques165

Particle Emission168

8.4 Postmortem Diagnostics170

Surface Charge State170

Surface Phase and Structure Analysis171

8.5 Future Directions174

APPENDIX:TECHNIQUE SUMMARIES181

1 Auger Electron Spectroscopy(AES)181

2 Cathodoluminescence(CL)182

3 Electron Energy-Loss Spectroscopy in the Transmission Electron Microscope(EELS)183

4 Energy-Dispersive X-Ray Spectroscopy(EDS)184

5 Fourier Transform Infrared Spectroscopy(FTIR)185

6 Light Microscopy186

7 Modulation Spectroscopy187

8 Nuclear Reaction Analysis(NRA)188

9 Optical Scatterometry189

10 Photoluminescence(PL)190

11 Photothermal Displacement Technique191

12 Raman Spectroscopy193

13 Rutherford Backscattering Spectrometry(RBS)194

14 Scanning Electron Microscopy(SEM)195

15 Scanning Transmission Electron Microscopy(STEM)196

16 Scanning Tunneling Microscopy and Scanning Force Microscopy(STM and SFM)197

17 Static Secondary Ion Mass Spectrometry(Static SIMS)198

18 Surface Roughness:Measurement,Formation by Sputtering,Impact on Depth Profiling199

19 Total Internal Reflection Microscopy200

20 Transmission Electron Microscopy(TEM)202

21 Variable-Angle Spectroscopic Ellipsometry(VASE)203

22 X-Ray Diffraction(XRD)204

23 X-Ray Fluorescence(XRF)205

24 X-Ray Photoelectron Spectroscopy(XPS)206

Index207

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