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光学材料的表征 英文【2025|PDF下载-Epub版本|mobi电子书|kindle百度云盘下载】
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- (美)布伦德尔,(美)埃文斯,(美)伊莎霍斯主编 著
- 出版社: 哈尔滨:哈尔滨工业大学出版社
- ISBN:9787560342795
- 出版时间:2014
- 标注页数:211页
- 文件大小:31MB
- 文件页数:227页
- 主题词:光学材料-研究-英文
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图书目录
INTRODUCTION1
PART Ⅰ:INFLUENCE OF SURFACE MORPHOLOGY AND MICROSTRUCTURE ON OPTICAL RESPONSE9
CHARACTERIZATION OF SURFACE ROUGHNESS9
1.1 Introduction9
1.2 What Surface Roughness Is10
1.3 How Surface Roughness Affects Optical Measurements14
1.4 How Surface Roughness and Scattering Are Measured14
1.5 Characterization of Selected Surfaces20
1.6 Future Directions23
CHARACTERIZATION OF THE NEAR-SURFACE REGION USING POLARIZATION-SENSITIVE OPTICAL TECHNIQUES27
2.1 Introduction27
2.2 Ellipsometry29
Experimental Implementations of Ellipsometry29
Analysis of Ellipsometry Data32
2.3 Microstructural Determinations from Ellipsometry Data34
Temperature Dependence of the Optical Properties of Silicon34
Determination of the Optical Functions of Glasses Using SE35
Spectroscopic Ellipsometry Studies of SiO2/Si37
Spectroscopic Ellipsometry for Complicated Film Structures38
Time-Resolved Ellipsometry40
Single-Wavelength Real-Time Monitoring of Film Growth41
Multiple-Wavelength Real-Time Monitoring of Film Growth42
Infrared Ellipsometry Studies of Film Growth44
THE COMPOSITION,STOICHIOMETRY,AND RELATED MICROSTRUCTURE OF OPTICAL MATERIALS49
3.1 Introduction49
3.2 Aspects of Raman Scattering50
3.3 Ⅲ-Ⅴ Semiconductor Systems51
3.4 Group Ⅳ Materials56
3.5 Amorphous and Microcrystalline Semiconductors59
Chalcogenide Glasses60
Group Ⅳ Microcrystalline Semiconductors63
3.6 Summary66
DIAMOND AS AN OPTICAL MATERIAL71
4.1 Introduction71
4.2 Deposition Methods72
4.3 Optical Properties of CVD Diamond74
4.4 Defects in CVD Diamond76
4.5 Polishing CVD Diamond79
4.6 X-ray Window80
4.7 Summary81
PART Ⅱ:STABILITY AND MODIFICATION OF FILM AND SURFACE OPTICAL PROPERTIES87
MULTILAYER OPTICAL COATINGS87
5.1 Introduction87
5.2 Single-Layer Optical Coatings89
Optical Constants90
Composition Measurement Techniques91
5.3 Multilayer Optical Coatings106
Compositional Analysis107
Surface Analytical Techniques108
Microstructural Analysis of Multilayer Optical Coatings109
5.4 Stability of Multilayer Optical Coatings111
5.5 Future Compositional and Microstructural Analytical Techniques113
CHARACTERIZATION AND CONTROL OF STRESS IN OPTICAL FILMS117
6.1 Introduction117
6.2 Origins of Stress119
6.3 Techniques for Modifying or Controlling Film Stress124
Effect of Deposition Parameters124
Effect of Ion-Assisted Deposition127
Effect of Impurities127
Effect of Post Deposition Annealing128
6.4 Stress Measurement Techniques130
Substrate Deformation130
X-Ray Diffraction(XRD)133
Raman Spectroscopy134
6.5 Future Directions136
SURFACE MODIFICATION OF OPTICAL MATERIALS141
7.1 Introduction141
7.2 Fundamental Processes142
Ion-Solid Interactions142
Defect Production,Rearrangement,and Retention143
7.3 Ion Implantation of Some Optical Materials145
Glasses and Amorphous Silica145
α-Quartz(SiO2)147
Halides148
Sapphire(α-Al2O3)149
LiNbO3152
Preparation of Optical Components by Ion Implantation153
LASER-INDUCED DAMAGE TO OPTICAL MATERIALS157
8.1 Introduction157
8.2 Laser Damage Definition and Statistics158
Defining Damage158
Collecting Damage Statistical Data159
Types of Damage Probability Distributions160
Identification of Pre-Damage Sites160
Changing the Damage Threshold161
8.3 In Situ Diagnostics165
Photothermal Techniques165
Particle Emission168
8.4 Postmortem Diagnostics170
Surface Charge State170
Surface Phase and Structure Analysis171
8.5 Future Directions174
APPENDIX:TECHNIQUE SUMMARIES181
1 Auger Electron Spectroscopy(AES)181
2 Cathodoluminescence(CL)182
3 Electron Energy-Loss Spectroscopy in the Transmission Electron Microscope(EELS)183
4 Energy-Dispersive X-Ray Spectroscopy(EDS)184
5 Fourier Transform Infrared Spectroscopy(FTIR)185
6 Light Microscopy186
7 Modulation Spectroscopy187
8 Nuclear Reaction Analysis(NRA)188
9 Optical Scatterometry189
10 Photoluminescence(PL)190
11 Photothermal Displacement Technique191
12 Raman Spectroscopy193
13 Rutherford Backscattering Spectrometry(RBS)194
14 Scanning Electron Microscopy(SEM)195
15 Scanning Transmission Electron Microscopy(STEM)196
16 Scanning Tunneling Microscopy and Scanning Force Microscopy(STM and SFM)197
17 Static Secondary Ion Mass Spectrometry(Static SIMS)198
18 Surface Roughness:Measurement,Formation by Sputtering,Impact on Depth Profiling199
19 Total Internal Reflection Microscopy200
20 Transmission Electron Microscopy(TEM)202
21 Variable-Angle Spectroscopic Ellipsometry(VASE)203
22 X-Ray Diffraction(XRD)204
23 X-Ray Fluorescence(XRF)205
24 X-Ray Photoelectron Spectroscopy(XPS)206
Index207
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